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Tuomo Suntola / Atomic Layer Deposition & Thin Film Devices

 

Recent Reviews on the ALD Technology

 

Riikka Puurunen, A Short History of Atomic Layer Deposition: Tuomo Suntola’s Atomic Layer Epitaxy, Chemical Vapor Deposition, Vol 20, Issue 10-11-12, Wiley Online Library

40 years of ALD in Finland - Photos, Stories, Exhibition by the Finnish Centre of Excellence in Atomic Layer Deposition

Maija Pohjakallio, Neljä vuosikymmentä ALD-kalvoja, KEMIA 7/2014 (In Finnish)

ALD in Wikipedia

 

Most cited patents and publications on Atomic Layer Deposition (Atomic Layer Epitaxy)

(Most recent at the top)

  • US Patent 6,572,705, 2003, T Suntola, S Lindfors, Method and apparatus for growing thin films.
  • T Suntola, Surface chemistry of materials deposition at atomic layer level, Applied Surface Science 100/101, pp. 391-398, Elsevier 1996.
  • US Patent 6,015,590, (1994/2000) T Suntola, S Lindfors, Method for growing thin films.
  • Tuomo Suntola, Atomic Layer Epitaxy, Handbook of Crystal Growth Vol. 3, Thin Films and Epitaxy, Edited by D.T.J. Hurle, Chapter 14, pp. 605-661, Elsevier Science B.V., 1994.
  • US Patent 5,711,811, (1994/1998) T Suntola, S Lindfors, P Soininen, Method and equipment for growing thin films.
  • T. Suntola, Cost-effective processing by atomic layer epitaxy, Thin Solid Films 225, pp. 96-98, Elsevier 1993.
  • T. Suntola, Atomic Layer Epitaxy, Review article, Thin Solid Films, Volume 216, Issue 1, 28 August 1992, pp. 84-89, Elsevier.
  • T. Suntola, Atomic Layer Epitaxy, Review article, Materials Science Reports, Vol 4, Number 7, December 1989, pp. 261-312, Elsevier.
  • T. Suntola, J. Hyvärinen, Atomic Layer Epitaxy, Annual review of materials science, Vol 15, pp.177-95, 1985.
  • US Patent 4,389,973 (1979/1983), TS Suntola, AJ Pakkala, SG Lindfors, Apparatus for performing growth of compound thin films.
  • US Patent 4,413,022 (1979/1983), TS Suntola, AJ Pakkala, SG Lindfors, A Method for performing growth of compound thin films by alternately repeating separate surface reactions of the substances comprising the compound.
  • US Patent 4,058,430 (1974/1977) Suntola, Antson, Method for producing compound thin films.

 

Books and Review Articles

(Most recent at the top)

R. L. Puurunen, H. Kattelus, T. Suntola, "Atomic layer deposition in MEMS technology", Ch. 26 of Handbook of Silicon Based MEMS Materials and Technologies, Ed. V. Lindroos et al. , pp. 433-446, Elsevier, 2010.

S. Haukka, E.-L. Lakomaa, T. Suntola, "Adsorption controlled preparation of heterogeneous catalysts", Adsorption and its Applications in Industry and Environmental Protection, A.Dabrowski, ed, Elsevier Science Publishers B.V.,1998.

T. Suntola, "Atomic Layer Epitaxy", Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanisms and Dynamics, Chapter 14, Elsevier Science Publishers B.V., 1994.

T. Suntola, "Atomic Layer Epitaxy", Handbook of Thin Film Process Technology, Institute of Physics (IOP) Publishing Inc., 1994.

T. Suntola, M. Simpson, "Atomic Layer Epitaxy", Blackie, Chapman &Hall, ISBN 0-412-02011-4, 1990

T. Suntola, "Atomic Layer Epitaxy", Materials Science Reports, Volume 4, number 7, December 1989, 0920-2307/89, Elsevier Science Publishers B.V.

 

Selected Conference Presentations

(Most recent at the top)

 

 

 

T.Suntola, "From the Basics to Industrial Applications", Keynote talk, Opening Symposium of Global Innovation Center, Kyushu University, April 7th, Fukuoka, Japan 2017 Presentation, ppsx

 

 ALD sequencesALD sequencesT. Suntola, "ALD - Material Buildup by Atomic Layers", 5th International Workshop on Applications of Nanoscience and Nanotechnology (IWANN-5), Bilkent University - UNAM, Ankara, Turkey, 15-26 June 2015 Presentation, ppsx

 

From_idea_industryFrom_idea_industryT. Suntola, "From ideas to global industry", BALTIC ALD, May 12-13, 2014, University of Helsinki Presentation, ppsx

 

 

 

 

ALD patentsALD patentsT. Suntola, "Invention of ALD and protection of knowledge", ENHANCE - Winter-School 9-12 January 2012, University of Helsinki Presentation, ppsx

 

 

 

 

T. Suntola, "35 years of ALD", Winter-School Picosun World Forum, 9-10 June 2009, Espoo

T. Suntola, "ALD for advanced semiconductor and nanotechnology manufacturing", Russian-Finnish Scientific Conference, 12 – 13 September 2007, Helsinki

T. Suntola, "30 years of ALD", ALD 2004 Conference, University of Helsinki

T. Suntola, "Atomic Layer Epitaxy", SID Display Works, Jan 1996, San Jose

E-L. Lakomaa, A. Root and T. Suntola, "Surface Reactions in Al2O3 growth from Trimethylaluminium and Water by Atomic Layer Epitaxy", ACSI-3, The Third International Symposium on Atomically Controlled Surfaces and Interfaces, Oct. 12 - 14, 1995, Raleigh, USA.

T. Suntola, "Surface Chemistry of Materials Deposition at Atomic Layer Level", 9th International Conference of Solid Surfaces, Yokohama, September 25 - 29, 1995

T. Suntola, "Atomic Layer Epitaxy for High Volume FPD Manufacturing", SID, Display Manufacturing Technology Conference, Santa Clara, CA, January 31 - February 2, 1995

S. Haukka, A. Kytökivi, E-l. Lakomaa, U. Lehtovirta, M. Lindblad, V. Lujala and T. Suntola, "The utilization of saturated gas-solid reactions in the preparation of heterogeneous catalysts", Studies in Surface Science and Catalysis 91. Preparation of Catalysts VI (1995) 957. Proc. 6th Int. symp. on Scientific Basis for the Preparation of Heterogeneous Catalysts, Sept. 5-8, 1994, Louvain-la Neuve, Belgium, Ed.G. Poncelet et al., Elsevier, Amsterdam

E-L. Lakomaa, M. Lindblad, T. Suntola, "Controlled processing of catalysts by Atomic Layer Epitaxy (ALE)", 2nd Tokyo Conf. on Advanced Catalystic Science and Technology, Aug. 21-26, 1994, Tokyo, Japan (Poster)

V. Lujala, J. Skarp, M. Tammenmaa, T. Suntola, J. Wallinga, "Zinc oxide thin films for solar cells prepared by Atomic Layer Epitaxy", Poster 9A.3, 12th E.C. Photovoltaic Solar Energy Conf., 11-15 April, 1994

S Haukka, E-L. Lakomaa, T. Suntola, "Surface coverage of ALE precursors on oxides", Atomic Layer Epitaxy and Related Surface Processes ( ALE-3), May 25-27, 1994, Sendai, Japan (Poster)

S. Haukka, A. Kytökivi, E-l. Lakomaa, U. Lehtovirta, M. Lindblad, V. Lujala, T. Suntola, "The utilization of saturated gas-solid reactions in the preparation of heterogeneous catalysts", 6th Int. symp. on Scientific Basis for the Preparation of Heterogeneous Catalysts, Sept. 5-8, 1994, Louvain-la neuve, Belgium. poster.

A. Hakuli, A. Kytökivi, O. Krause, T. Suntola, "FTIR in the quantitative analysis of gaseous reaction product mixture", 6th Nordic Symp. on Catalysis, June 1-3, 1994, Hornbaek, Denmark (poster)

S. Haukka, E-L. Lakomaa, T. Suntola, "Chemisorption of chromium acetylacetonate on porous high surface area silica", The 2nd Int. Symp. on Atomically Controlled Surfaces and Interfaces, ACSI-2. June 16-18, 1993, Joensuu, Finland. poster

S. Haukka, E-L. Lakomaa, T. Suntola, "Analytical and chemical techniques in the study of surface species in Atomic Layer Epitaxy", 2nd Int. Symp. on Atomic Layer Epitaxy, June 2-5, 1992, Raleigh, NC. USA

T. Suntola, "Atomic Layer Epitaxy", ISSCG-8, Palm Springs, CA, August 9-14, 1992

E-L. Lakomaa, S. Haukka, T. Suntola, "Atomic layer growth of TiO2 on silica", The First Int. Symp. on Atomically Controlled Surfaces and Interfaces. Nov. 19-22, 1991, Tokyo, Japan

J. Skarp, Y. Koskinen, S. Lindfors, A. Rautiainen, T. Suntola, "Development and evaluation of CdS/CdTe thin film PV cells", Proc. 10th E.C. Photovoltaic Solar Energy Conf., 8-12 April, 1991, Lisbon, Portugal, p. 567-9

T. Suntola, "Atomic Layer Epitaxy", Proc. of the 16th Int. Conf. on Solid State Devices and Materials, Kobe (1984) p. 647

T. Suntola, "Atomic Layer Epitaxy", Tech. Digest of ICVGE-5, San Diego, 1981,

T. Suntola, J. Antson, A. Pakkala, S. Lindfors, "Thin Film Electroluminescent device", SID 80 Digest (1980) 108

 

Selected Papers on ALD and Thin Films

(Most recent at the top)

E-L. Lakomaa, A. Root and T. Suntola, "Surface Reactions in Al2O3 growth from Trimethylaluminium and Water by Atomic Layer Epitaxy", ACSI-3, The Third International Symposium on Atomically Controlled Surfaces and Interfaces, Oct. 12 - 14, 1995, Raleigh, USA

S. Haukka, E-L. Lakomaa, T. Suntola, "Chemisorption of chromium acetylacetonate on porous high surface area silica", Appl. Surf. Sci. 75(1994) 220

V. Lujala, J.Skarp, M.Tammenmaa,T.Suntola, "Atomic layer epitaxy growth of doped zinc oxide thin films from organometals", Applied Surface Science 82/83 (1994) 34-40

T.Suntola, "CdTe Thin-Film Solar Cells", MRS Bulletin, Vol. XVIII, No. 10, 1993

M. Lindblad, L.P. Lindfors & T. Suntola, "Preparation of Ni/Al2O3 catalysts from vapor phase by Atomic Layer Epitaxy", Catal. Lett. 27 (1994) 323

T. Suntola, "Cost-effective processing by atomic layer epitaxy", Thin Solid Films 225(1993) 96-98

S. Haukka, E-L. Lakomaa, T. Suntola, "Analytical and chemical techniques in the study of surface species in Atomic Layer Epitaxy", Thin Solid Films 225(1992) 280

J. Skarp, E. Anttila, A. Rautiainen, T. Suntola, "ALE-CdS/CdTe-PV-cells", Int. J. Solar Energy, Vol. 12, 1992, p. 137-142

E-L. Lakomaa, S. Haukka, T. Suntola, "Atomic layer growth of TiO2 on silica", Appl Surf. Sci. 60/61 (1992) 742

T. Suntola, "Atomic Layer Epitaxy", Thin Solid Films 216(1992), 82-89

J. Skarp, Y.Koskinen, S.Lindfors, A. Rautiainen and T. Suntola, "Development and Evaluation of CdS/CdTe Thin Film PV Cells", 10th European Photovoltaic Solar Energy Conference and Exhibition, Lisbon, Portugal, 8.-12. April, 1991

T. Suntola, J. Hyvärinen, "Atomic Layer Epitaxy", Ann. Rev. Mater. Sci. 15 (1985) 177

M. Pessa, R. Mäkelä, T. Suntola, "Characterization of Surface Exchange Reactions Used to Grow Compound Films", Appl. Phys. Letters 38 (1981) 131

M. Ahonen, M. Pessa, T. Suntola, "A Study of ZnTe Films Grown on Glass Substrates Using an Atomic Layer Evaporation Method", Thin Solid Films 65 (1980) 301

T. Suntola, "Amorphous thin film active elements in switching devices", Thin Solid Films 34 (1976) 9-16

T. Suntola, "Electrical Conduction and Switching in Chalcogenide Thin Films", Acta Polytechnica Scandinavica, series no. 82, 1971.

T. Suntola, "On the Mechanism of Switching Effects in Chalcogenide Thin Films", Solid-State Electronics 1971, Vol. 14, pp. 933-938